DECEMBER - JANUARY9 available frequency bands or power ranges, accuracy levels or certification ­ the conventional power sensing technologies that have been around for decades are increasingly no longer capable of providing the functionality needed in the latest processes. As a result, we are seeing the emergence of new generations of much more accurate and highly integrated RF power measurement and calibration systems.NEW TECHNOLOGIES FOR PRECISION RF POWER APPLICATIONSFigure 1 shows a typical set up for an RF power system incorporating an RF generator, control system and matching network, as well as the latest generation of RF power sensing technology. Advanced Energy's TEGAM® GEMINITM 5540A has been inserted into the system, enabling a continuous use, closed loop configuration providing direct control information back to the generator. Designed to improve the fidelity and consistency of leading-edge plasma-based processes, the unit's calibration is certified in accordance with ISO 17025 and allows OEMs to accurately calibrate the system and monitor RF power in real time. Combining sensor and meter capability in a single instrument enables users to replace multiple tools, while wide frequency and power ranges from 0.2 to 200 MHz and 3 to 5,000 W respectively further support the use of fewer instruments.Furthermore, thanks to excellent accuracy and an ISO 17025 compliant calibration, the same power meter can also be used for offline measurement and calibration during periodic system maintenance. The unit shown here measures with 2-sigma accuracy of ±0.5% + 0.5 W, which is up to four times more accurate than legacy technologies. A large, easy-to-read 6-digit OLED digital display simultaneously shows forward and reverse power, voltage standing wave ratio (VSWR) and frequency. Insertion loss is rated at less than 0.05 dB and, because there are multiple internal measurement channels, there is no need for system reconfiguration for forward and reverse power measurements. Meter calibration is required just once a year (compared to once every six months for conventional instruments) and accuracy can be calibrated for multiple, customer-specified frequencies. The unit is powered through a USB type B port, operating with a 5 VDC, 500 mA input, which can be supplied via a standard USB 2.0 port from a PC, an external battery pack, or AC power adaptor and off-the-shelf USB cable. In addition to taking measurements directly, the meter can also be connected to a PC via USB or Ethernet (optional configuration) for collection, storage and audit of data using real-time data visualization software. This provides a resource that significantly enhances process traceability, supports application trouble-shooting and helps users to identify ways to improve productivity and process efficiency. The software - which automatically detects connected meters and can collect data from up to five meters simultaneously ­ can be used to graph forward and reverse power readings in real-time, zoom to points of interest, and save data to a user-defined location. In addition, an integrated simulation mode allows users to test an application when no meter is available and to see how the addition of one or more meters to an existing process could be used to improve measurement and control. SUMMARYDriven by advanced semiconductor design and fabrication processes the demand for RF plasma power is growing rapidly. Analysts with Transparency Market Research1, for example, estimate that the market will increase from $991 million in 2021 to $5.1 billion by the end of 2031 - a compound annual growth rate (CAGR) of 16.4% - and that the market will transform with the increased availability of systems that offer unique features for configuration and control.In line with the growth, the transition from conventional measurement tools to next-generation, highly integrated RF power sensing and metering technology will play an important role in supporting these configuration and control requirements - both in terms of providing accurate and precise measurement of frequency and power and with respect to ensuring accurate system calibration in accordance with standards such as ISO 17025. Figure 1: RF power solution with in-line sensing systemFigure 2: Collecting measurement data via a PC
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